Ion implantation science and technology/
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| Format: | Book |
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| Language: | English |
| Published: |
Orlando, Fla.:
Academic Pr.,
1984.
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| Subjects: | |
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| Item Description: | Includes bibliographical reference and index |
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| Physical Description: | xi, 635p.: ill., tables; 23cm. |
| ISBN: | 0127806202 |