Cita APA (7th ed.)

Elliott, . D. J. (1968). Microlithography: Process technology for 10 fabrication. Mc graw Hill.

Cita Chicago (17th ed.)

Elliott, David J. Microlithography: Process Technology for 10 Fabrication. New York: Mc graw Hill, 1968.

Cita MLA (9th ed.)

Elliott, David J. Microlithography: Process Technology for 10 Fabrication. Mc graw Hill, 1968.