APA (7th ed.) Citation

Elliott, . D. J. (1968). Microlithography: Process technology for 10 fabrication. Mc graw Hill.

Chicago Style (17th ed.) Citation

Elliott, David J. Microlithography: Process Technology for 10 Fabrication. New York: Mc graw Hill, 1968.

MLA (9th ed.) Citation

Elliott, David J. Microlithography: Process Technology for 10 Fabrication. Mc graw Hill, 1968.