Elliott, . D. J. (1968). Microlithography: Process technology for 10 fabrication. Mc graw Hill.
Citación estilo ChicagoElliott, David J. Microlithography: Process Technology for 10 Fabrication. New York: Mc graw Hill, 1968.
Cita MLAElliott, David J. Microlithography: Process Technology for 10 Fabrication. Mc graw Hill, 1968.
Warning: These citations may not always be 100% accurate.