Elliott, . D. J. (1968). Microlithography: Process technology for 10 fabrication. Mc graw Hill.
Chicago Style (17. basım) AtıfElliott, David J. Microlithography: Process Technology for 10 Fabrication. New York: Mc graw Hill, 1968.
MLA (9th ed.) AtıfElliott, David J. Microlithography: Process Technology for 10 Fabrication. Mc graw Hill, 1968.
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