Microlithography : Process technology for 10 fabrication /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Mc graw Hill ,
C 1968.
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| Subjects: | |
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| Physical Description: | xix , 378p. : ill. ; 24cm . |
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| Bibliography: | Includes bibliographical references ,index & tables . |
| ISBN: | 0070193045 |