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Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices /

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, begi...

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Bibliográfalaš dieđut
Váldodahkki:	Hilleringmann, Ulrich (Dahkki)
Searvvušdahkki:	SpringerLink (Online service)
Materiálatiipa:	Elektrovnnalaš E-girji
Giella:	eaŋgalasgiella
Almmustuhtton:	Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg, 2023.
Preanttus:	1st ed. 2023.
Fáttát:	Electronics. Electronic circuits. Semiconductors. Electronics and Microelectronics, Instrumentation. Electronic Circuits and Systems.
Liŋkkat:	https://doi.org/10.1007/978-3-658-41041-4
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

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