Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices /

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, begi...

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Bibliographic Details

Main Author:	Hilleringmann, Ulrich (Author)
Corporate Author:	SpringerLink (Online service)
Format:	Electronic eBook
Language:	English
Published:	Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg, 2023.
Edition:	1st ed. 2023.
Subjects:	Electronics. Electronic circuits. Semiconductors. Electronics and Microelectronics, Instrumentation. Electronic Circuits and Systems.
Online Access:	https://doi.org/10.1007/978-3-658-41041-4
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