Data-Driven Scheduling of Semiconductor Manufacturing Systems

This book systematically discusses the intelligent scheduling problem of complex semiconductor manufacturing systems from theory to method and then to application. The main contents include data-driven scheduling framework of semiconductor manufacturing system, data preprocessing of semiconductor ma...

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Bibliographic Details
Main Authors: Li, Li (Author), Yu, Qingyun (Author), Lin, Kuo-Yi (Author), Ma, Yumin (Author), Qiao, Fei (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Singapore : Springer Nature Singapore : Imprint: Springer, 2023.
Edition:1st ed. 2023.
Series:Advanced and Intelligent Manufacturing in China,
Subjects:
Online Access:https://doi.org/10.1007/978-981-19-7588-2
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