Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control syst...
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| Autor Corporativo: | |
| Formato: | Recurso Electrónico livro electrónico |
| Idioma: | inglês |
| Publicado em: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2023.
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| Edição: | 1st ed. 2023. |
| Assuntos: | |
| Acesso em linha: | https://doi.org/10.1007/978-981-19-9247-6 |
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| Resumo: | This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes. |
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| Descrição Física: | 1 online resource (X, 224 p. 200 illus.). 137 illus. in color. |
| ISBN: | 9789811992476 |
| DOI: | 10.1007/978-981-19-9247-6 |