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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control syst...

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Bibliografski detalji
Glavni autor: Cao, Huiliang (Autor)
Autor kompanije: SpringerLink (Online service)
Format: Elektronički e-knjiga
Jezik:engleski
Izdano: Singapore : Springer Nature Singapore : Imprint: Springer, 2023.
Izdanje:1st ed. 2023.
Teme:
Aerospace engineering.
Astronautics.
Control engineering.
Robotics.
Automation.
Aerospace Technology and Astronautics.
Control, Robotics, Automation.
Online pristup:https://doi.org/10.1007/978-981-19-9247-6
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Sadržaj:
  • Chapter 1 Introduction
  • Chapter 2 Silicon-based MEMS gyroscope structure and working principle
  • Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model
  • Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization
  • Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology
  • Chapter 6 Temperature influence on MEMS gyroscope and suppression method
  • Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology
  • References.

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