Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control syst...

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Bibliographic Details

Main Author:	Cao, Huiliang (Author)
Corporate Author:	SpringerLink (Online service)
Format:	Electronic eBook
Language:	English
Published:	Singapore : Springer Nature Singapore : Imprint: Springer, 2023.
Edition:	1st ed. 2023.
Subjects:	Aerospace engineering. Astronautics. Control engineering. Robotics. Automation. Aerospace Technology and Astronautics. Control, Robotics, Automation.
Online Access:	https://doi.org/10.1007/978-981-19-9247-6
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