APA (7th ed.) Citation

Schepis, D., & Seshan, K. (2025). Handbook of thin film deposition: Theory, technology and semiconductor applications (Fifth edition.). Elsevier.

Chicago Style (17th ed.) Citation

Schepis, Dominic, and Krishna Seshan. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Amsterdam: Elsevier, 2025.

MLA (9th ed.) Citation

Schepis, Dominic, and Krishna Seshan. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Elsevier, 2025.