Active Probe Atomic Force Microscopy A Practical Guide on Precision Instrumentation /

From a perspective of precision instrumentation, this book provides a guided tour to readers on exploring the inner workings of atomic force microscopy (AFM). Centered around AFM, a broad range of mechatronic system topics are covered including mechanics, sensors, actuators, transmission design, sys...

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Bibliographic Details

Main Authors:	Xia, Fangzhou (Author), Rangelow, Ivo W. (Author), Youcef-Toumi, Kamal (Author)
Corporate Author:	SpringerLink (Online service)
Format:	Electronic eBook
Language:	English
Published:	Cham : Springer International Publishing : Imprint: Springer, 2024.
Edition:	1st ed. 2024.
Subjects:	Measurement. Measuring instruments. Electronics. Mechatronics. Spectrum analysis. Microtechnology. Microelectromechanical systems. Measurement Science and Instrumentation. Electronics and Microelectronics, Instrumentation. Spectroscopy. Microsystems and MEMS.
Online Access:	https://doi.org/10.1007/978-3-031-44233-9
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