APA (7th ed.) Citation

Prall, K. (2025). CMOS Plasma and Process Damage (1st ed. 2025.). Springer Nature Switzerland : Imprint: Springer. https://doi.org/10.1007/978-3-031-89029-1

Chicago Style (17th ed.) Citation

Prall, Kirk. CMOS Plasma and Process Damage. 1st ed. 2025. Cham: Springer Nature Switzerland : Imprint: Springer, 2025. https://doi.org/10.1007/978-3-031-89029-1.

MLA (9th ed.) Citation

Prall, Kirk. CMOS Plasma and Process Damage. 1st ed. 2025. Springer Nature Switzerland : Imprint: Springer, 2025. https://doi.org/10.1007/978-3-031-89029-1.