CMOS Plasma and Process Damage

This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to th...

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Bibliographic Details

Main Author:	Prall, Kirk (Author)
Corporate Author:	SpringerLink (Online service)
Format:	Electronic eBook
Language:	English
Published:	Cham : Springer Nature Switzerland : Imprint: Springer, 2025.
Edition:	1st ed. 2025.
Subjects:	Electronic circuit design. Embedded computer systems. Solid state physics. Electronics Design and Verification. Embedded Systems. Electronic Devices.
Online Access:	https://doi.org/10.1007/978-3-031-89029-1
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