Photoresist Technology in Microsystems: Principles, Processes and Applications
This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller,...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2025.
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| Edition: | 1st ed. 2025. |
| Series: | Springer Series in Advanced Microelectronics,
15 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-981-95-1606-3 |
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