Photoresist Technology in Microsystems: Principles, Processes and Applications
This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller,...
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| Format: | Elektroniczne E-book |
| Język: | angielski |
| Wydane: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2025.
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| Wydanie: | 1st ed. 2025. |
| Seria: | Springer Series in Advanced Microelectronics,
15 |
| Hasła przedmiotowe: | |
| Dostęp online: | https://doi.org/10.1007/978-981-95-1606-3 |
| Etykiety: |
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| 245 | 1 | 0 | |a Photoresist Technology in Microsystems: Principles, Processes and Applications |h [electronic resource] / |c by Kaiying Wang. |
| 250 | |a 1st ed. 2025. | ||
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| 505 | 0 | |a 1. Introduction to Photoresist Technology -- 2. Fundamentals of Photoresist Chemistry -- 3. Microsystems Fabrication Processes -- 4. Advanced Photoresist Materials for Microsystems -- 5. Photoresist Processing Techniques -- 6. Photoresist Applications in Microsystems -- 7. High-Aspect-Ratio Lithography for Microsystems -- 8. Challenges in Photoresist Technology for Microsystems -- 9. Emerging Trends in Photoresist Technology -- 10. Future Perspectives. | |
| 520 | |a This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller, faster, and more efficient microsystems grows, the role of photoresists in achieving high-resolution patterning and complex 3D structures has become increasingly critical. However, despite its importance, there is a lack of comprehensive resources that bridge the gap between the fundamental principles of photoresist chemistry, advanced fabrication techniques, and their diverse applications. This book addresses this gap by providing a unified and up to-date exploration of photoresist technology, making it a timely and essential contribution to the field. The book balances theoretical depth with practical insights, making it accessible to readers with varying levels of expertise. The book is designed to cater to a broad audience, from students and researchers to industry professionals. A unique feature of this book is its emphasis on the interplay between material properties, processing techniques, and application-specific requirements. | ||
| 532 | 8 | |a Accessibility summary: This PDF has been created in accordance with the PDF/UA-1 standard to enhance accessibility, including screen reader support, described non-text content (images, graphs), bookmarks for easy navigation, keyboard-friendly links and forms and searchable, selectable text. We recognize the importance of accessibility, and we welcome queries about accessibility for any of our products. If you have a question or an access need, please get in touch with us at accessibilitysupport@springernature.com. Please note that a more accessible version of this eBook is available as ePub. | |
| 532 | 8 | |a No reading system accessibility options actively disabled | |
| 532 | 8 | |a Publisher contact for further accessibility information: accessibilitysupport@springernature.com | |
| 588 | |a Print version record. | ||
| 650 | 0 | |a Microtechnology. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Electronics. | |
| 650 | 0 | |a Polymers. | |
| 650 | 0 | |a Photochemistry. | |
| 650 | 1 | 4 | |a Microsystems and MEMS. |
| 650 | 2 | 4 | |a Electronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | |a Polymers. |
| 650 | 2 | 4 | |a Photochemistry. |
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| 950 | |a Engineering (R0) (SpringerNature-43712) | ||
| 950 | |a Focus Bundle Biological and Physical Engineering (SpringerNature-85401) | ||