Imaxe de Portada

Photoresist Technology in Microsystems: Principles, Processes and Applications

This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller,...

Descrición completa

Gardado en:

Detalles Bibliográficos
Autor Principal:	Wang, Kaiying (Author)
Autor Corporativo:	SpringerLink (Online service)
Formato:	Electrónico eBook
Idioma:	inglés
Publicado:	Singapore : Springer Nature Singapore : Imprint: Springer, 2025.
Edición:	1st ed. 2025.
Series:	Springer Series in Advanced Microelectronics, 15
Subjects:	Microtechnology. Microelectromechanical systems. Electronics. Polymers. Photochemistry. Microsystems and MEMS. Electronics and Microelectronics, Instrumentation.
Acceso en liña:	https://doi.org/10.1007/978-981-95-1606-3
Tags:	Engadir etiqueta Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!

Títulos similares

Micro- and Nano-Systems in 21st-Century Designs, Developments, Applications and Perspective /
Publicado: (2025)

Nanofabrication Principles, Capabilities and Limits /
por: Cui, Zheng
Publicado: (2024)

Metasurfaces: Towards Tunable and Reconfigurable Meta-devices
por: Zhu, Weiming, et al.
Publicado: (2023)

MEMS and Microfluidics in Healthcare Devices and Applications Perspectives /
Publicado: (2023)

Micro and Nanomanufacturing Volume II
Publicado: (2025)

Microactuators, Microsensors and Micromechanisms MAMM 2022 /
Publicado: (2023)

Micro and Nanoelectronics Devices, Circuits and Systems Select Proceedings of MNDCS 2024 /
Publicado: (2025)

Micro and Nanoelectronics Devices, Circuits and Systems Select Proceedings of MNDCS 2023 /
Publicado: (2024)

Chiplet Design and Heterogeneous Integration Packaging
por: Lau, John H.
Publicado: (2023)

Micro and Nanoelectronics Devices, Circuits and Systems Select Proceedings of MNDCS 2022 /
Publicado: (2023)

Frontiers of Nanobiotechnology Microfluidic Devices and BioMEMS for the Future /
por: Naghib, Seyed Morteza, et al.
Publicado: (2025)

Sensors and Microsystems Proceedings of AISEM 2025 /
Publicado: (2025)

Active Probe Atomic Force Microscopy A Practical Guide on Precision Instrumentation /
por: Xia, Fangzhou, et al.
Publicado: (2024)

Nano-photonics for Advanced Networks
por: Asakawa, Kiyoshi, et al.
Publicado: (2025)

The 3rd International Conference on Nanomaterials and Advanced Composites Proceedings of NAC 2022, July 15-17, Tokushima, Japan /
Publicado: (2024)

Nanoelectronics, Nanooptics, Nanochemistry and Nanobiotechnology, and Their Applications Selected Proceedings of the 10th International Conference on Nanotechnologies and Nanomaterials (NANO2022), 25–27 August 2022, Ukraine /
Publicado: (2023)

Ultra-low Voltage Circuit Techniques for Energy Harvesting
por: Radin, Rafael Luciano, et al.
Publicado: (2023)

Piezotronics and Piezo-Phototronics Applications to Third-Generation Semiconductors /
por: Wang, Zhong Lin, et al.
Publicado: (2023)

Fundamentals of Nanomechanical Resonators
por: Schmid, Silvan, et al.
Publicado: (2023)

Science and Technology of 2D MoS2
Publicado: (2024)

Physics of Quantum Rings
Publicado: (2025)

Fundamentals of Mechanisms and Machines
por: Manik, Dhanesh N.
Publicado: (2024)

Model Order Reduction for Design, Analysis and Control of Nonlinear Vibratory Systems
Publicado: (2025)

Emerging Materials and Environment
Publicado: (2024)

Molecular Communications An Analysis from Networking Theories Perspective /
por: Cevallos, Yesenia, et al.
Publicado: (2024)

CMOS-based Portable NMR/MRI Microsystems
por: Fan, Shuhao, et al.
Publicado: (2025)

Perovskites for Next-Generation Wearable Technology
por: Darab, Mahdi, et al.
Publicado: (2025)

Nanoscale Lab-on-a-Chip Sensors Healthcare Applications /
por: Kalasin, Surachate
Publicado: (2025)

In-Situ Transmission Electron Microscopy
Publicado: (2023)

Emerging Nanotechnologies in Nanocellulose
Publicado: (2023)

Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices /
por: Hilleringmann, Ulrich
Publicado: (2023)

Proceedings of the 1st International Conference on Materials and Thermophysical Properties ICMTP-2024, 21-23 November, Jaipur, India /
Publicado: (2025)

Springer Handbook of Aerogels
Publicado: (2023)

Contact-Electrification of Matter
por: Wang, Zhong Lin
Publicado: (2025)

Measurement and Sensor Systems A Comprehensive Guide to Principles, Practical Issues and Applications /
por: Koch, Alexander W.
Publicado: (2023)

The 5th International Conference on Vibration and Energy Harvesting Applications (VEH 2024)
Publicado: (2025)

Micromachined Mixed-Potential-Type YSZ-Based Sensors for Nitrogen Dioxide Monitoring in Automobile Exhaust
por: You, Rui
Publicado: (2024)

Applications in Electronics and Computing Systems Proceedings of the 4th International Conference on Applications in Electronics and Computing Systems AECS–2022 /
Publicado: (2023)

Metamaterial-Based Electromagnetic Radiations and Applications
por: Duan, Zhaoyun
Publicado: (2025)

Advances in Nonlinear Dynamics and Control of Mechanical and Physical Systems Selected Articles from CSNDD 2023; 15–17 May; Marrakesh, Morocco /
Publicado: (2024)