Photoresist Technology in Microsystems: Principles, Processes and Applications
This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller,...
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| Institution som forfatter: | |
| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
Singapore :
Springer Nature Singapore : Imprint: Springer,
2025.
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| Udgivelse: | 1st ed. 2025. |
| Serier: | Springer Series in Advanced Microelectronics,
15 |
| Fag: | |
| Online adgang: | https://doi.org/10.1007/978-981-95-1606-3 |
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Indholdsfortegnelse:
- 1. Introduction to Photoresist Technology
- 2. Fundamentals of Photoresist Chemistry
- 3. Microsystems Fabrication Processes
- 4. Advanced Photoresist Materials for Microsystems
- 5. Photoresist Processing Techniques
- 6. Photoresist Applications in Microsystems
- 7. High-Aspect-Ratio Lithography for Microsystems
- 8. Challenges in Photoresist Technology for Microsystems
- 9. Emerging Trends in Photoresist Technology
- 10. Future Perspectives.