Photoresist Technology in Microsystems: Principles, Processes and Applications

This book presents a comprehensive overview of recent advances in photoresist technology, a cornerstone of modern microfabrication. Photoresists enable the precise patterning essential for creating microelectronic devices, MEMS, biomedical systems, and photonic components. As the demand for smaller,...

Full description

Bibliographic Details

Main Author:	Wang, Kaiying (Author)
Corporate Author:	SpringerLink (Online service)
Format:	Electronic eBook
Language:	English
Published:	Singapore : Springer Nature Singapore : Imprint: Springer, 2025.
Edition:	1st ed. 2025.
Series:	Springer Series in Advanced Microelectronics, 15
Subjects:	Microtechnology. Microelectromechanical systems. Electronics. Polymers. Photochemistry. Microsystems and MEMS. Electronics and Microelectronics, Instrumentation.
Online Access:	https://doi.org/10.1007/978-981-95-1606-3
Tags:	Add Tag No Tags, Be the first to tag this record!